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Discontinued Operations - Financial Results (Details) - USD ($)
$ in Thousands
12 Months Ended
Sep. 30, 2021
Sep. 30, 2020
Sep. 30, 2019
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]      
Net income (loss) from discontinued operations $ 139,616 $ 91,215 $ 498,543
Discontinued Operations, Held-for-sale | Semiconductor Automation Business      
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]      
Total revenue 680,056 508,736 446,669
Total cost of revenue 384,536 300,861 265,013
Gross profit 295,520 207,875 181,656
Research and development 48,647 41,245 39,045
Selling, general and administrative 70,634 50,881 48,635
Restructuring charges 230 692 506
Total operating expenses 119,511 92,818 88,186
Operating (loss) income 176,009 115,057 93,470
Other income (loss), net 133 207 (69)
Income before income taxes 176,142 115,264 93,401
Income tax provision (benefit) 35,357 23,867 22,719
Net income (loss) from discontinued operations 140,785 91,397 70,682
Discontinued Operations, Held-for-sale | Semiconductor Automation Business | Products      
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]      
Total revenue 624,358 463,309 403,634
Total cost of revenue 354,786 274,727 238,301
Discontinued Operations, Held-for-sale | Semiconductor Automation Business | Services      
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]      
Total revenue 55,698 45,427 43,035
Total cost of revenue 29,750 26,134 26,712
Discontinued Operations, Disposed of by Sale | Semiconductor Cryogenics Business      
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]      
Total revenue     109,518
Total cost of revenue     66,164
Gross profit     43,354
Research and development     6,605
Selling, general and administrative 279 (171) 20,889
Restructuring charges     24
Total operating expenses 279 (171) 27,518
Operating (loss) income (279) 171 15,836
Other income (loss), net (1,256) (410) 539,948
Loss on discontinued operations before income taxes (1,535) (239) 555,784
Income tax provision (benefit) (366) (57) 134,110
Income (loss) before equity in earnings of equity method investment (1,169) (182) 421,674
Equity in earnings of equity method investment     6,188
Net income (loss) from discontinued operations $ (1,169) $ (182) 427,862
Discontinued Operations, Disposed of by Sale | Semiconductor Cryogenics Business | Products      
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]      
Total revenue     76,227
Total cost of revenue     47,148
Discontinued Operations, Disposed of by Sale | Semiconductor Cryogenics Business | Services      
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]      
Total revenue     33,291
Total cost of revenue     $ 19,016