Acquisitions - Goodwill (Details) - USD ($) $ in Thousands	Jun. 30, 2021	Apr. 29, 2021	Dec. 03, 2020	Sep. 30, 2020	Feb. 11, 2020
Goodwill
Goodwill	$ 551,326			$ 501,536
Brooks Semiconductor Solutions Group
Goodwill
Goodwill	81,270			48,359
Brooks Life Sciences Products
Goodwill
Goodwill	110,771			103,278
Brooks Life Sciences Services
Goodwill
Goodwill	359,285			$ 349,899
Precise Automation, Inc.
Goodwill
Goodwill		$ 32,900
Goodwill deductible for tax purposes		$ 0
Other Acquisition, Closed Third Quarter, Fiscal Year 2021
Goodwill
Goodwill	4,400
Goodwill deductible for tax purposes	$ 4,400
Trans-Hit Biomarkers
Goodwill
Goodwill			$ 9,300
Goodwill deductible for tax purposes			$ 0
RURO, Inc.
Goodwill
Goodwill					$ 11,000
Goodwill deductible for tax purposes					$ 0