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Goodwill and Intangible Assets - Components of Goodwill by Operating Segment (Details) - USD ($)
$ in Thousands
Mar. 31, 2021
Sep. 30, 2020
Goodwill [Line Items]    
Gross goodwill $ 1,128,051 $ 1,116,494
Accumulated goodwill impairments (614,958) (614,958)
Goodwill 513,093 501,536
Brooks Semiconductor Solutions Group    
Goodwill [Line Items]    
Gross goodwill 637,174 637,303
Accumulated goodwill impairments (588,944) (588,944)
Goodwill 48,230 48,359
Brooks Life Sciences Products    
Goodwill [Line Items]    
Gross goodwill 105,851 103,278
Goodwill 105,851 103,278
Brooks Life Sciences Services    
Goodwill [Line Items]    
Gross goodwill 359,012 349,899
Goodwill 359,012 349,899
Other    
Goodwill [Line Items]    
Gross goodwill 26,014 26,014
Accumulated goodwill impairments $ (26,014) $ (26,014)