Discontinued Operations - General Information (Details) - USD ($) $ in Millions	Jul. 01, 2019	Aug. 27, 2018
Edwards Vacuum LLC
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Transition service agreement, term, high end of range		9 months
Aggregate amount to purchase goods		$ 1.0
Supply agreement term		1 year
Lease term		3 years
Option to renew		true
ULVAC Cryogenics, Inc.
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Ownership interest (as a percent)		50.00%
Discontinued Operations, Held-for-sale \| Semiconductor Cryogenics Business
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Consideration		$ 675.0
Discontinued operation, name of segment		Brooks Semiconductor Solutions Group
Discontinued Operations, Disposed of by Sale \| Semiconductor Cryogenics Business
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Consideration	$ 659.8
Net working capital adjustments	(1.8)
Net cash proceeds from the sale	$ 551.7

Aggregate amount to purchase goods under supply agreement.

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The amount of consideration retained by the buyer, receivable for the disposal of assets and liabilities, including discontinued operation.

+ References

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The amount of proceeds from sale or disposal of business net of taxes.

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Supply agreement term after closing of disposition.

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Transition Service Agreement, Term, High End of Range

+ References

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- Definition

Indicates business segment that includes component or group of components disposed of or classified as held-for-sale representing strategic shift that has or will have major effect on operation and financial result.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 205
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-Section 50
-Paragraph 1
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Amount of consideration received or receivable for the disposal of assets and liabilities, including discontinued operation.

+ References

No definition available.

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- Definition

The percentage of ownership of common stock or equity participation in the investee accounted for under the equity method of accounting.

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Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

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- Definition

Indicates (true false) whether lessee has option to extend operating lease.

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-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
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Term of lessor's operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

+ References

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-Publisher FASB
-Name Accounting Standards Codification
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-SubTopic 30
-Section 50
-Paragraph 3
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