Discontinued Operations - Unconsolidated Subsidiaries - Statements of Operations (Details) - ULVAC Cryogenics, Inc. - USD ($) $ in Thousands	3 Months Ended	6 Months Ended
Mar. 31, 2019	Mar. 31, 2019
Equity Method Investment, Summarized Financial Information, Income Statement [Abstract]
Total revenue	$ 22,756	$ 45,050
Gross profit	8,305	17,241
Operating Income	4,078	9,214
Net income	$ 2,602	$ 6,108

The amount of gross profit (loss) reported by an equity method investment of the entity.

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Amount of income (loss) from continuing operations reported by an equity method investee.

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Amount of revenue from sale of product and rendering of service reported by equity method investee.

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