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Goodwill and Intangible Assets - Components of Goodwill by Operating Segment (Details) - USD ($)
$ in Thousands
Dec. 31, 2018
Sep. 30, 2018
Goodwill [Line Items]    
Gross goodwill $ 1,105,483 $ 870,834
Accumulated goodwill impairments (614,958) (614,958)
Goodwill 490,525 255,876
Brooks Semiconductor Solutions Group    
Goodwill [Line Items]    
Gross goodwill 636,740 636,907
Accumulated goodwill impairments (588,944) (588,944)
Goodwill 47,796 47,963
Brooks Life Sciences    
Goodwill [Line Items]    
Gross goodwill 442,729 207,913
Goodwill 442,729 207,913
Other    
Goodwill [Line Items]    
Gross goodwill 26,014 26,014
Accumulated goodwill impairments $ (26,014) $ (26,014)