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Discontinued Operations - General Information (Details)
$ in Millions
Aug. 27, 2018
USD ($)
Edwards Vacuum LLC  
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]  
Transition service agreement, term, high end of range 9 months
Aggregate amount to purchase goods $ 1.0
Supply agreement term 1 year
Lease term 3 years
ULVAC Cryogenics, Inc.  
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]  
Ownership interest (as a percent) 50.00%
Discontinued Operations, Held-for-sale | Semiconductor Cryogenics Business  
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]  
Consideration in cash $ 675.0