XML 83 R66.htm IDEA: XBRL DOCUMENT v3.10.0.1
Discontinued Operations - Non-cash Items and Capital Expenditures (Details) - Semiconductor Cryogenics Business - Held-for-sale - USD ($)
$ in Thousands
12 Months Ended
Sep. 30, 2018
Sep. 30, 2017
Sep. 30, 2016
Discontinued Operation, Alternative Cash Flow Information [Abstract]      
Depreciation and amortization $ 743 $ 919 $ 1,034
Capital expenditures 302 1,049 560
Stock-based compensation 966 705 460
Earnings of equity method investment $ (6,788) $ (9,834) $ (3,445)