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Goodwill and Intangible Assets - Components of Goodwill by Operating Segment (Details) - USD ($)
$ in Thousands
Jun. 30, 2018
Sep. 30, 2017
Goodwill [Line Items]    
Gross goodwill $ 897,163 $ 848,596
Accumulated goodwill impairments (614,958) (614,958)
Goodwill 282,205 233,638
Brooks Semiconductor Solutions Group    
Goodwill [Line Items]    
Gross goodwill 663,157 655,762
Accumulated goodwill impairments (588,944) (588,944)
Goodwill 74,213 66,818
Brooks Life Sciences    
Goodwill [Line Items]    
Gross goodwill 207,992 166,820
Goodwill 207,992 166,820
Other    
Goodwill [Line Items]    
Gross goodwill 26,014 26,014
Accumulated goodwill impairments $ (26,014) $ (26,014)