Acquisitions - Defined Benefit Plan (Details) - Tec-Sem Group AG $ in Millions	Apr. 06, 2018 USD ($)
Defined Benefit Plan, Funded (Unfunded) Status of Plan [Abstract]
Plan assets	$ 6.2
Unfunded projected benefit obligation	3.3
Plan liability	$ 9.5
Defined benefit plan, type	us-gaap:PensionPlansDefinedBenefitMember
Defined benefit plan, sponsor location	us-gaap:ForeignPlanMember country:CH