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Goodwill and Intangible Assets - Components of Goodwill by Operating Segment (Details) - USD ($)
$ in Thousands
Jun. 30, 2017
Sep. 30, 2016
Goodwill [Line Items]    
Gross goodwill $ 825,567 $ 817,096
Accumulated goodwill impairments (614,958) (614,958)
Goodwill, net of accumulated impairments 210,609 202,138
Brooks Semiconductor Solutions Group    
Goodwill [Line Items]    
Gross goodwill 655,725 655,781
Accumulated goodwill impairments (588,944) (588,944)
Goodwill, net of accumulated impairments 66,781 66,837
Brooks Life Science Systems    
Goodwill [Line Items]    
Gross goodwill 143,828 135,301
Goodwill, net of accumulated impairments 143,828 135,301
Other    
Goodwill [Line Items]    
Gross goodwill 26,014 26,014
Accumulated goodwill impairments $ (26,014) $ (26,014)