POWER OF ATTORNEY

Know all by these presents, that the undersigned

hereby constitutes
and appoints each of Thomas S. Grilk  and Lynda M.

Avallone, signing
singly, the undersigned's true and lawful

attorney-in-fact to:

(1)	execute for and on behalf of the
undersigned,
in the undersigned's
capacity as an officer and/or
director of Brooks
Automation, Inc. (the
"Company"), Forms 3, 4, and
5 in accordance with
Section 16(a) of the
Securities Exchange Act of
1934 and the rules
thereunder;

(2)	do and perform any and all acts
for and on behalf of
the undersigned
which may be necessary or
desirable to complete and
execute any such Form
3, 4, or 5, complete
and execute any amendment or
amendments thereto, and
timely file such
form with the United States
Securities and Exchange
Commission and
any stock exchange or similar
authority; and

(3)	take any other
action of any type whatsoever in
connection with the
foregoing which,
in the opinion of such
attorney-in-fact, may be of benefit
to, in the
best interest of, or
legally required by, the undersigned, it
being
understood that the
documents executed by such attorney-in-fact on

behalf of the undersigned
pursuant to this Power of Attorney shall be
in
such form and shall
contain such terms and conditions as such
attorney-in-
fact may approve
in such attorney-in-fact's discretion.


The undersigned hereby grants
to each such attorney-in-fact full

power and authority to do and perform
any and every act and thing

whatsoever requisite, necessary, or proper
to be done in the exercise
of
any of the rights and powers herein
granted, as fully to all
intents and
purposes as the undersigned might
or could do if
personally present, with
full power of substitution or
revocation,
hereby ratifying and confirming
all that such
attorney-in-fact, or
such attorney-in-fact's substitute or
substitutes,
shall lawfully do
or cause to be done by virtue of this power
of
attorney and the
rights and powers herein granted.  The undersigned

acknowledges that
the foregoing attorneys-in-fact, in serving in such

capacity at the
request of the undersigned, are not assuming, nor is the

Company
assuming, any of the undersigned's responsibilities to comply
with

Section 16 of the Securities Exchange Act of 1934.

This Power
of
Attorney shall remain in full force and effect until
the undersigned

is no longer required to file Forms 3, 4, and 5 with
respect to the

undersigned's holdings of and transactions in securities
issued by
the
Company, unless earlier revoked by the undersigned in a
signed
writing
delivered to the foregoing attorneys-in-fact.

IN WITNESS
WHEREOF, the
undersigned has caused this Power of Attorney
to be
executed as of this
30th day of  June, 2003.

/s/ Joseph R.
Martin
Signature


Joseph R. Martin
Print Name