Joint Ventures (Tables)

3 Months Ended

Dec. 31, 2012

ULVAC Cryogenics, Inc.

Summarized Condensed Financial Information

Summarized condensed financial information for UCI is as follows (in thousands):

	Quarter Ended September 30,
	2012		2011
Statements of Operations:
Revenue	$	10,260	$	25,732
Gross profit		3,251		7,672
Net income		156		1,732

Yaskawa Brooks Automation, Inc.

Summarized Condensed Financial Information

Summarized condensed financial information for YBA is as follows (in thousands):

	Quarter Ended December 20,
	2012			2011
Statements of Operations:
Revenue	$	13,039		$	23,723
Gross profit		1,824			2,350
Net income (loss)		(95	)		88