CONSOLIDATED STATEMENTS OF CASH FLOWS (USD $) In Thousands, unless otherwise specified	9 Months Ended
	Jun. 30, 2012	Jun. 30, 2011
Cash flows from operating activities
Net income	$ 20,582	$ 117,717
Adjustments to reconcile net income to net cash provided by operating activities:
Depreciation and amortization	16,159	12,336
Stock-based compensation	6,903	5,211
Amortization of premium on marketable securities	1,804	1,534
Undistributed earnings of joint ventures	(1,676)	(3,057)
(Gain) loss on disposal of long-lived assets	(62)	24
Sale of contract manufacturing business		(45,009)
Changes in operating assets and liabilities, net of acquisitions and disposals:
Accounts receivable	(10,007)	(461)
Inventories	961	(11,248)
Prepaid expenses and other current assets	(1,141)	3,245
Accounts payable	6,496	(11,812)
Deferred revenue	(3,625)	(1,410)
Accrued warranty and retrofit costs	(72)	(638)
Accrued compensation and benefits	(3,869)	(72)
Accrued restructuring costs	465	(2,943)
Accrued expenses and other current liabilities	(344)	3,802
Net cash provided by operating activities	32,574	67,219
Cash flows from investing activities
Purchases of property, plant and equipment	(6,364)	(4,163)
Purchases of marketable securities	(93,306)	(145,821)
Sale/maturity of marketable securities	96,499	78,644
Proceeds from the sale of the contract manufacturing business		75,664
Proceeds from assets sold		4,372
Acquisitions, net of cash acquired	(8,716)	(3,381)
Other investment	(3,000)
Decrease (increase) in restricted cash	531	(760)
Net cash (used in) provided by investing activities	(14,356)	4,555
Cash flows from financing activities
Proceeds from the issuance of common stock, net of issuance costs	841	681
Common stock dividend paid	(15,719)
Net cash (used in) provided by financing activities	(14,878)	681
Effects of exchange rate changes on cash and cash equivalents	(609)	837
Net increase in cash and cash equivalents	2,731	73,292
Cash and cash equivalents, beginning of period	58,833	59,823
Cash and cash equivalents, end of period	$ 61,564	$ 133,115