EXHIBIT 23.05

CONSENT OF INDEPENDENT ACCOUNTANTS

We hereby consent to the incorporation by reference in this Registration Statement on Form S-3 of Brooks-PRI Automation, Inc. of our report dated November 19, 2001 relating to the financial statements of PRI Automation, Inc., which appears in the Current Report on Form 8-K/A of Brooks-PRI Automation, Inc. filed August 28, 2002. We also consent to the reference to us under the heading “Experts” in such Registration Statement.

/s/ PricewaterhouseCoopers LLP

Boston, Massachusetts
August 28, 2002