EXHIBIT 23.01



                       CONSENT OF INDEPENDENT ACCOUNTANTS


We hereby consent to the incorporation by reference in this Registration
Statement on Form S-8 of Brooks Automation, Inc. of our report dated November
14, 2001, except for the first paragraph of Note 15, as to which the date is
December 13, 2001, relating to the financial statements and financial statement
schedule, which appears in Brooks Automation, Inc.'s Annual Report on Form
10-K/A for the year ended September 30, 2001.


/s/ PricewaterhouseCoopers LLP
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Boston, Massachusetts
May 10, 2002