EX-23.03 5 b42873s3ex23-03.txt CONSENT OF ERNST & YOUNG EXHIBIT 23.03 CONSENT OF ERNST & YOUNG LLP, INDEPENDENT AUDITORS We consent to the reference to our firm under the caption "Experts" in the Registration Statement (Form S-3) and related Prospectus of Brooks Automation, Inc. for the registration of 153,625 shares of its common stock and to the incorporation by reference therein of our report dated March 3, 2000, except for Note 4 as to which the date is March 31, 2000, with respect to the financial statements of Irvine Optical Company, LLC for the years ended December 31, 1999 and 1998 included in the Annual Report (Form 10-K/A) of Brooks Automation, Inc. for the year ended September 30, 2001 filed with the Securities and Exchange Commission. /s/ Ernst & Young LLP Woodland Hills, California April 25, 2002