EXHIBIT 99.06

                      THIS PROXY IS SOLICITED ON BEHALF OF
                 THE BOARD OF DIRECTORS OF PRI AUTOMATION, INC.
                A STOCKHOLDER WISHING TO VOTE IN ACCORDANCE WITH
             THE RECOMMENDATIONS OF THE BOARD OF DIRECTORS NEED ONLY
        SIGN AND DATE THIS PROXY AND RETURN IT IN THE ENCLOSED ENVELOPE.

                PLEASE COMPLETE AND RETURN THE PROXY CARD BELOW.



                                   DETACH HERE

                                      PROXY

                              PRI AUTOMATION, INC.

                    PROXY FOR SPECIAL MEETING OF STOCKHOLDERS
                          TO BE HELD ON MARCH __, 2002

         The undersigned stockholder of PRI Automation, Inc. ("PRI"), revoking
all prior proxies, hereby appoints Mitchell G. Tyson, Cosmo S. Trapani and
Douglas Lawson, or any of them acting singly, proxies, with full power of
substitution, to vote all shares of capital stock of PRI which the undersigned
is entitled to vote at the Special Meeting of Stockholders to be held at the
offices of Foley, Hoag & Eliot LLP, One Post Office Square, Sixteenth Floor,
Boston, Massachusetts 02109, on March __, 2002, beginning at 2 p.m., local time,
and at any adjournments or postponements thereof, upon the matters set forth in
the Notice of Special Meeting of Stockholders dated ______________, 2002 and the
related joint proxy statement/prospectus, copies of which have been received by
the undersigned, and in their discretion upon any other business that may
properly come before the Special Meeting or any adjournments or postponements
thereof. Attendance of the undersigned at the Special Meeting or any adjournment
or postponement thereof will not be deemed to revoke this proxy unless the
undersigned shall affirmatively indicate the intention of the undersigned to
vote the shares represented hereby in person prior to the exercise of this
proxy.

         THE SHARES REPRESENTED BY THIS PROXY WILL BE VOTED AS DIRECTED OR, IF
NO DIRECTION IS GIVEN WITH RESPECT TO ANY PROPOSAL SET FORTH ON THE REVERSE
SIDE, WILL BE VOTED FOR SUCH PROPOSAL OR OTHERWISE IN ACCORDANCE WITH THE
RECOMMENDATION OF THE BOARD OF DIRECTORS.

SEE REVERSE SIDE   CONTINUED AND TO BE SIGNED ON REVERSE SIDE   SEE REVERSE SIDE

                                   DETACH HERE

[ X ] Please mark votes as in this example.

1.   Approval and adoption of the agreement and plan of merger dated as of
     October 23, 2001 among Brooks Automation, Inc., Pontiac Acquisition Corp.
     and PRI Automation, Inc.

              FOR [   ]                 AGAINST [   ]              ABSTAIN [   ]

2.   Grant of discretionary authority to adjourn the Special Meeting to a date
     or dates not later than April __, 2002, if necessary to solicit additional
     proxies in favor of Proposal No. 1.

              FOR [   ]                 AGAINST [   ]              ABSTAIN [   ]


3.   Approval of an amendment to the PRI Automation, Inc. 2000 Employee Stock
     Purchase Plan to increase the number of shares of PRI common stock
     available for issuance under the plan from 350,000 to 850,000.

              FOR [   ]                 AGAINST [   ]              ABSTAIN [   ]



MARK HERE FOR ADDRESS CHANGE AND NOTE AT LEFT     [     ]


Please promptly date and sign this proxy and mail it in the enclosed envelope to
assure representation of your shares. No postage need be affixed if mailed in
the United States.

Please sign exactly as your name or names appear(s) on your stock certificate.
If you hold shares as joint tenants, both should sign. If the stockholder is a
corporation, please sign full corporate name by president or other authorized
officer and, if a partnership, please sign full partnership name by an
authorized partner or other authorized person. If signing as an attorney,
executor, administrator, trustee or guardian, please give full title as such.

Signature: ____________  Date: _____        Signature: ____________  Date: _____


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