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                                                                    EXHIBIT 23.1


                       CONSENT OF INDEPENDENT ACCOUNTANTS


We hereby consent to the incorporation by reference in this Registration
Statement on Form S-8 of our report dated November 15, 2000 relating to the
financial statements and financial statement schedules of Brooks Automation,
Inc., which appears in Brooks Automation, Inc.'s Annual Report on Form 10-K for
the year ended September 30, 2000.


PricewaterhouseCoopers LLP

Boston, Massachusetts
May 25, 2001