Acquisitions - Additional Information (Detail) (USD $)	12 Months Ended			3 Months Ended			3 Months Ended		0 Months Ended	12 Months Ended				12 Months Ended		3 Months Ended	1 Months Ended
	Sep. 30, 2014	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2014 Dynamic Micro Systems	Jun. 30, 2014 Dynamic Micro Systems	Apr. 30, 2014 Dynamic Micro Systems	Jun. 30, 2014 Dynamic Micro Systems Completed technology	Jun. 30, 2014 Dynamic Micro Systems Customer relationships	Aug. 01, 2013 Matrical	Sep. 30, 2014 Matrical Completed technology	Sep. 30, 2014 Matrical Customer relationships	Aug. 01, 2013 Crossing Automation Inc	Oct. 29, 2012 Crossing Automation Inc	Sep. 30, 2014 Crossing Automation Inc Completed technology	Sep. 30, 2014 Crossing Automation Inc Customer relationships	Mar. 31, 2012 Intevac, Inc.	Dec. 31, 2011 CeligoCell Cytometer product line	Sep. 30, 2014 CeligoCell Cytometer product line	Dec. 30, 2011 CeligoCell Cytometer product line
Business Acquisition [Line Items]
Merger consideration, net of cash						$ 31,625,000			$ 9,326,000			$ 59,005,000	$ 59,005,000
Escrow refund				2,200,000
Escrow reserve				3,200,000
Amortizable lives							5 years	8 years		4 years 7 months	7 years			7 years 8 months	8 years
Revenue of acquiree					5,500,000
Net loss of acquiree					4,500,000
Inventory step up					1,900,000
Amortization expense for intangible assets	10,600,000	9,800,000	6,700,000		900,000
Restructuring charges	6,289,000	6,293,000			300,000
Business acquisition, cash payment									9,300,000							3,000,000	8,700,000
Business acquisition deferred cash payable																			500,000
Impairment loss	$ 614,958,000	$ 614,958,000	$ 614,958,000															$ 2,400,000