Equity Method Investments Narrative (Detail) (USD $)	3 Months Ended		9 Months Ended
	Jun. 30, 2014	Jun. 30, 2013	Jun. 30, 2014	Jun. 30, 2013	Sep. 30, 2013
Schedule of Equity Method Investments [Line Items]
Equity in earnings (losses) of joint ventures	$ 71,000	$ 236,000	$ 1,330,000	$ 220,000
Equity investment in joint ventures	30,760,000		30,760,000		25,687,000
BioCision, LLC
Schedule of Equity Method Investments [Line Items]
Joint venture interest, percentage	22.00%		22.00%
Investment cost	4,000,000		4,000,000
Equity in earnings (losses) of joint ventures	(100,000)		(100,000)
Equity investment in joint ventures	3,900,000		3,900,000
ULVAC Cryogenics, Inc.
Schedule of Equity Method Investments [Line Items]
Joint venture interest, percentage	50.00%		50.00%
Equity in earnings (losses) of joint ventures	200,000	300,000	1,400,000	400,000
Equity investment in joint ventures	23,900,000		23,900,000
Management fee payments received	200,000		500,000	400,000
Charges incurred from related parties	200,000	100,000	300,000	500,000
Accounts payable for unpaid products and services	108,000		108,000		0
Yaskawa Brooks Automation, Inc.
Schedule of Equity Method Investments [Line Items]
Joint venture interest, percentage	50.00%		50.00%
Equity in earnings (losses) of joint ventures	(70,000)	(65,000)	(53,000)	(143,000)
Equity investment in joint ventures	2,900,000		2,900,000
Charges incurred from related parties	100,000	100,000	400,000	400,000
Accounts payable for unpaid products and services	59,000		59,000		47,000
Revenues earned from joint ventures	2,700,000	1,200,000	5,600,000	4,100,000
Due from joint venture	$ 2,200,000		$ 2,200,000		$ 2,300,000