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Acquisition Pro Forma Information (Details) (Dynamic Micro Systems, USD $)
In Thousands, unless otherwise specified
3 Months Ended 9 Months Ended
Jun. 30, 2014
Jun. 30, 2013
Jun. 30, 2014
Jun. 30, 2013
Dynamic Micro Systems
       
Business Acquisition [Line Items]        
Revenue $ 119,580 $ 116,903 $ 379,433 $ 336,539
Net income (loss) attributable to Brooks Automation, Inc. $ 21,291 $ 1,320 $ 26,384 $ (10,927)