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Acquisition Amounts of Assets and Liabilities at Fair Value as of Acquisition Date (Detail) (USD $)
In Thousands, unless otherwise specified
9 Months Ended 0 Months Ended 0 Months Ended 0 Months Ended
Jun. 30, 2014
Jun. 30, 2013
Sep. 30, 2013
Apr. 30, 2014
Dynamic Micro Systems
Apr. 30, 2014
Dynamic Micro Systems
Apr. 30, 2014
Dynamic Micro Systems
Completed Technology
Apr. 30, 2014
Dynamic Micro Systems
Customer Relationships
Aug. 01, 2013
Matrical
Aug. 01, 2013
Matrical
Completed Technology
Aug. 01, 2013
Matrical
Customer Relationships
Oct. 29, 2012
Crossing Automation Inc
Oct. 29, 2012
Crossing Automation Inc
Completed Technology
Oct. 29, 2012
Crossing Automation Inc
Customer Relationships
Business Acquisition [Line Items]                          
Accounts receivable         $ 15,262     $ 636     $ 5,356    
Inventory         10,126     2,095     8,668    
Prepaid and other current assets         2,727     103     1,968    
Property, plant and equipment         2,145     534     2,270    
Finite-lived intangibles           3,610 7,100   500 1,500   10,530 20,010
Goodwill 113,238   97,924   15,375     7,076     26,453    
Other long term assets                     885    
Debt               (902)          
Accounts payable         (10,393)     (294)     (3,024)    
Accrued liabilities         (7,120)           (5,172)    
Deferred revenue         (996)     (351)     (319)    
Long-term deferred tax liabilities         (3,968)                
Customer deposits               (1,249)          
Other current liabilities               (322)     (388)    
Other long-term liabilities                     (8,232)    
Total purchase price, net of cash acquired $ 37,832 $ 59,005   $ 33,868       $ 9,326     $ 59,005