Acquisition Narrative (Detail) (USD $)	3 Months Ended		9 Months Ended		0 Months Ended	3 Months Ended		3 Months Ended		0 Months Ended	3 Months Ended	12 Months Ended		0 Months Ended	9 Months Ended
	Jun. 30, 2014	Jun. 30, 2013	Jun. 30, 2014	Jun. 30, 2013	Apr. 30, 2014 Dynamic Micro Systems	Jun. 30, 2014 Dynamic Micro Systems	Apr. 30, 2014 Dynamic Micro Systems	Jun. 30, 2014 Dynamic Micro Systems Completed Technology	Jun. 30, 2014 Dynamic Micro Systems Customer Relationships	Aug. 01, 2013 Matrical	Dec. 31, 2013 Matrical	Sep. 30, 2013 Matrical Completed Technology	Sep. 30, 2013 Matrical Customer Relationships	Oct. 29, 2012 Crossing Automation Inc	Jun. 30, 2014 Crossing Automation Inc Completed Technology	Jun. 30, 2014 Crossing Automation Inc Customer Relationships
Business Acquisition [Line Items]
Acquisition, net of cash acquired			$ 37,832,000	$ 59,005,000	$ 33,868,000					$ 9,326,000				$ 59,005,000
Total purchase price							31,000,000
Provisional working capital adjustment					5,900,000
Cash acquired from acquisition					3,000,000
Useful life of intangible assets acquired								5 years	8 years			4 years 7 months	7 years		7 years 8 months	8 years
Purchase accounting adjustments											61,000
Business Combination, Pro Forma Information, Revenue of Acquiree since Acquisition Date, Actual						1,000,000
Business Combination, Pro Forma Information, Earnings or Loss of Acquiree since Acquisition Date, Actual						1,800,000
Inventory Step Up						100,000
Amortization of acquired intangible assets	1,606,000	1,399,000	4,522,000	4,255,000		400,000
Restructuring Charges	$ 3,122,000	$ 560,000	$ 4,641,000	$ 5,914,000		$ 300,000