Joint Ventures Summarized Condensed Financial Information for Ulvac Cryogenics, Inc (Detail) (ULVAC Cryogenics, Inc., USD $) In Thousands, unless otherwise specified	3 Months Ended		9 Months Ended
	Jun. 30, 2013	Jun. 30, 2012	Jun. 30, 2013	Jun. 30, 2012
ULVAC Cryogenics, Inc.
Condensed Consolidating Financial Information [Line Items]
Revenue	$ 13,092	$ 15,098	$ 59,026	$ 31,971
Gross profit	3,139	3,852	16,659	8,799
Net income	$ 603	$ 658	$ 3,609	$ 726