CONSOLIDATED STATEMENTS OF CASH FLOWS (USD $) In Thousands, unless otherwise specified	9 Months Ended
	Jun. 30, 2013	Jun. 30, 2012
Cash flows from operating activities
Net income (loss)	$ (8,162)	$ 20,582
Adjustments to reconcile net income (loss) to net cash provided by operating activities:
Depreciation and amortization	18,258	16,159
Stock-based compensation	5,625	6,903
Amortization of premium on marketable securities	972	1,804
Undistributed earnings of joint ventures	(220)	(1,676)
Deferred income tax benefit	(364)	0
Pension settlement	87	0
Loss on disposal of long-lived assets	375	(62)
Changes in operating assets and liabilities, net of acquisitions and disposals:
Accounts receivable	(3,508)	(10,007)
Inventories	17,334	961
Prepaid expenses and other current assets	(1,585)	(1,141)
Accounts payable	(758)	6,496
Deferred revenue	6,351	(3,625)
Accrued warranty and retrofit costs	(1,194)	(72)
Accrued compensation and benefits	(211)	(3,869)
Accrued restructuring costs	(579)	465
Accrued expenses and other current liabilities	(2,784)	(344)
Net cash provided by operating activities	29,637	32,574
Cash flows from investing activities
Purchases of property, plant and equipment	(2,710)	(6,364)
Purchases of marketable securities	(72,581)	(93,306)
Sale/maturity of marketable securities	127,582	96,499
Acquisition, net of cash acquired	(59,005)	(8,716)
Proceeds from the sale of property, plant and equipment	3,169	0
Payment of deferred leasing cost	(3,134)	0
Payments to Acquire Other Investments	0	(3,000)
Decrease in restricted cash	763	531
Net cash provided by (used in) investing activities	(5,916)	(14,356)
Cash flows from financing activities
Proceeds from issuance of common stock, net of issuance costs	969	841
Common stock dividend paid	(15,987)	(15,719)
Net cash used in financing activities	(15,018)	(14,878)
Effects of exchange rate changes on cash and cash equivalents	(1,454)	(609)
Net increase (decrease) in cash and cash equivalents	7,249	2,731
Cash and cash equivalents, beginning of period	54,639	58,833
Cash and cash equivalents, end of period	$ 61,888	$ 61,564