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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
Originator-Key-Asymmetric:
 MFgwCgYEVQgBAQICAf8DSgAwRwJAW2sNKK9AVtBzYZmr6aGjlWyK3XmZv3dTINen
 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 OABAM0hc58nyT/PRpsG9gE92b/e1kKtT6A5h2ILp9AyxN29SO0paoh0fQX/orkbm
 Y7Jh7luqOJYSLoOPHyMr0g==

<SEC-DOCUMENT>9999999997-02-051908.txt : 20020923
<SEC-HEADER>9999999997-02-051908.hdr.sgml : 20020923
<ACCEPTANCE-DATETIME>20020923150617
<PAPER>
ACCESSION NUMBER:		9999999997-02-051908
CONFORMED SUBMISSION TYPE:	REGDEX
PUBLIC DOCUMENT COUNT:		1
ITEM INFORMATION:		
FILED AS OF DATE:		20020916

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			TEGAL CORP /DE/
		CENTRAL INDEX KEY:			0000931059
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				680370244
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			0331

	FILING VALUES:
		FORM TYPE:		REGDEX
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	021-48437
		FILM NUMBER:		02057152

	BUSINESS ADDRESS:	
		STREET 1:		2201 S MCDOWELL BLVD
		STREET 2:		PO BOX 6020
		CITY:			PETALUMA
		STATE:			CA
		ZIP:			94955
		BUSINESS PHONE:		7077635600

	MAIL ADDRESS:	
		STREET 1:		2201 S MCDOWELL BLVD
		STREET 2:		PO BOX 6020
		CITY:			PETALUMA
		STATE:			CA
		ZIP:			94955
</SEC-HEADER>
<DOCUMENT>
<TYPE>REGDEX
<SEQUENCE>1
<FILENAME>9999999997-02-051908.paper
<DESCRIPTION>AUTO-GENERATED PAPER DOCUMENT
<TEXT>
This document was generated as part of a paper submission.
Please reference the Document Control Number 02057152 for access to the original document.
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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