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Filing Detail
Form S-3 - Registration statement under Securities Act of 1933:
SEC Accession No. 0001144204-04-002204
Filing Date
2004-02-27
Accepted
2004-02-27 16:08:10
Documents
3

Document Format Files

Seq Description Document Type Size
1 v01816_s3.txt S-3 108324
3 v01816_ex5-1.txt EX-5.1 3125
4 v01816_ex23-2.txt EX-23.2 631
  Complete submission text file 0001144204-04-002204.txt   113709
Mailing Address 2201 S MCDOWELL BLVD PO BOX 6020 PETALUMA CA 94955
Business Address 2201 S MCDOWELL BLVD PO BOX 6020 PETALUMA CA 94955 7077635600
TEGAL CORP /DE/ (Filer) CIK: 0000931059 (see all company filings)

IRS No.: 680370244 | State of Incorp.: DE | Fiscal Year End: 0331
Type: S-3 | Act: 33 | File No.: 333-113147 | Film No.: 04635332
SIC: 3559 Special Industry Machinery, NEC