TEGAL LOGO

                                POWER OF ATTORNEY

         Know all by these presents, that the undersigned hereby authorizes
Thomas R. Mika of Tegal Corporation (the "Company"), to execute for and on
behalf of the undersigned, in the undersigned's capacity as an officer or
director of the Company, Forms 3, 4 and 5, and any amendments thereto, and cause
such form(s) to be filed with the United States Securities and Exchange
Commission pursuant to Section 16(a) of the Securities Act of 1934, relating to
the undersigned's beneficial ownership of securities in the Company. The
undersigned hereby grants to each such attorney-in-fact full power and authority
to do and perform any and every act and thing whatsoever requisite, necessary,
or proper to be done in the exercise of any of the rights and powers herein
granted, as fully to all intents and purposes as the undersigned might or could
do if personally present, with full power of substitution or revocation, hereby
ratifying and confirming all that such attorney-in-fact, or such
attorney-in-fact's substitute or substitutes, shall lawfully do or cause to be
done by virtue of this power of attorney and the rights and powers herein
granted. The undersigned acknowledges that the foregoing attorneys-in-fact, in
serving in such capacity at the request of the undersigned, are not assuming,
nor is the Company assuming, any of the undersigned's responsibilities to comply
with Section 16 of the Securities Exchange Act of 1934.

         This Power of Attorney shall remain in full force and effect until the
undersigned is no longer required to file Forms 3, 4 and 5 with respect to the
undersigned's holdings of, and transactions in, securities issued by the
Company, unless earlier revoked by the undersigned in a signed writing delivered
to the foregoing attorneys-in-fact.

         IN WITNESS WHEREOF, the undersigned has cause this Power of Attorney to
be executed as of this 13th day of August, 2003.

                                                  /S/ Carole Anne Demachkie
                                                  ----------------------------
                                                    (name of individual)