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Semiconductor and MEMS Capital Equipment related Asset Sales (Tables)
3 Months Ended
Jun. 30, 2012
Capital Equipment Related Asset Acquisitions and Sales [Abstract]  
Assets and liabilities of discontinued operations
The assets and liabilities of discontinued operations are presented separately under the captions "Other assets of discontinued operations" and "Liabilities of discontinued operations," respectively, in the accompanying condensed consolidated balance sheets at June 30, 2012 and March 31, 2012 and consist of the following:

   
June 30,
  
March 31,
 
   
2012
  
2012
 
        
Assets of Discontinued Operations:
      
Accounts and other receivables, net of allowances for sales returns and doubtful accounts of $0 at June 30, 2012 and March 31, 2012, respectively
 $-  $410 
Prepaid expenses and other current assets
  11   8 
Total assets of discontinued operations
 $11  $418 
          
Liabilities of Discontinued Operations:
        
Accrued expenses and other current liabilities
 $206  $246 
Total liabilities of discontinued operations
 $206  $246