Document And Entity Information (USD $)	6 Months Ended
	Sep. 30, 2011	Oct. 18, 2011	Mar. 31, 2011
Entity Registrant Name	TEGAL CORP /DE/
Entity Central Index Key	0000931059
Current Fiscal Year End Date	--03-31
Entity Well-known Seasoned Issuer	No
Entity Voluntary Filers	No
Entity Current Reporting Status	Yes
Entity Filer Category	Smaller Reporting Company
Entity Public Float			$ 5,066,421
Entity Common Stock, Shares Outstanding		1,688,807
Document Fiscal Year Focus	2011
Document Fiscal Period Focus	Q2
Document Type	10-Q
Amendment Flag	false
Document Period End Date	Sep. 30, 2011