EX-21.1 3 list_subsidiaries.htm TEGAL10K_EXHIBIT21.1_LIST_OF_SUBSIDIARIES Unassociated Document
 
List of Subsidiaries of Tegal Corporation
 
   
Corporate Name
 
Jurisdiction of Incorporation
 
Tegal Germany
 
Germany
 
Tegal Japan, Inc.
 
Japan
 
Tegal Italy Srl
 
Italy
 
Sputtered Films, Inc.
 
California