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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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MIC-Info: RSA-MD5,RSA,
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 gW9XyW8MOx5BmZlalixdRA==

<SEC-DOCUMENT>0000931059-05-000099.txt : 20050922
<SEC-HEADER>0000931059-05-000099.hdr.sgml : 20050922
<ACCEPTANCE-DATETIME>20050922150344
ACCESSION NUMBER:		0000931059-05-000099
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20050913
FILED AS OF DATE:		20050922
DATE AS OF CHANGE:		20050922

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			MATTSON BRAD
		CENTRAL INDEX KEY:			0000943666

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-26824
		FILM NUMBER:		051098007

	BUSINESS ADDRESS:	
		STREET 1:		3550 WEST WARREN AVENUE
		CITY:			FREMONT
		STATE:			CA
		ZIP:			94538

	MAIL ADDRESS:	
		STREET 1:		C/O MATTSON TECHNOLOGY
		STREET 2:		3550 WEST WARREN AVENUE
		CITY:			FREMONT
		STATE:			CA
		ZIP:			94538

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			TEGAL CORP /DE/
		CENTRAL INDEX KEY:			0000931059
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				680370244
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			0331

	BUSINESS ADDRESS:	
		STREET 1:		2201 SOUTH MCDOWELL BLVD
		CITY:			PETALUMA
		STATE:			CA
		ZIP:			94954
		BUSINESS PHONE:		7077635600

	MAIL ADDRESS:	
		STREET 1:		2201 SOUTH MCDOWELL BLVD
		CITY:			PETALUMA
		STATE:			CA
		ZIP:			94954
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>form4mattson091305_ex.xml
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2005-09-13</periodOfReport>

    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0000931059</issuerCik>
        <issuerName>TEGAL CORP /DE/</issuerName>
        <issuerTradingSymbol>TGAL</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0000943666</rptOwnerCik>
            <rptOwnerName>MATTSON BRAD</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O TEGAL CORPORATION</rptOwnerStreet1>
            <rptOwnerStreet2>2201 S. MCDOWELL BLVD</rptOwnerStreet2>
            <rptOwnerCity>PETALUMA</rptOwnerCity>
            <rptOwnerState>CA</rptOwnerState>
            <rptOwnerZipCode>94954</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>1</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle>Executive Chairman</officerTitle>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Restricted Stock Units</value>
                <footnoteId id="F1"/>
            </securityTitle>
            <transactionDate>
                <value>2005-09-13</value>
            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>400000</value>
                </transactionShares>
                <transactionPricePerShare>
                    <footnoteId id="F1"/>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>2400000</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
    </nonDerivativeTable>

    <footnotes>
        <footnote id="F1">The reporting person received an award of 400,000 restricted stock units pursuant to the Tegal Corporation 1998 Equity
Participation Plan (the &quot;1998 Plan&quot;). Each restricted stock unit represents the reporting person's right to purchase one
share of Tegal Corporation's (&quot;Tegal&quot;) common stock within thirty days following the earliest of (1) November 27, 2006, (2)
the reporting person's termination of employment with Tegal, (3) the reporting person's death or disability, or (4) the date
immediately prior to a change of control.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>Christine T. Hergenrother by Power of Atty</signatureName>
        <signatureDate>2005-09-22</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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