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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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MIC-Info: RSA-MD5,RSA,
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 L06WDvRS5iCcUH0sPVMw4Q==

<SEC-DOCUMENT>0000931059-05-000036.txt : 20050611
<SEC-HEADER>0000931059-05-000036.hdr.sgml : 20050611
<ACCEPTANCE-DATETIME>20050525115618
ACCESSION NUMBER:		0000931059-05-000036
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20050520
FILED AS OF DATE:		20050525
DATE AS OF CHANGE:		20050525

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			TEGAL CORP /DE/
		CENTRAL INDEX KEY:			0000931059
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				680370244
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			0331

	BUSINESS ADDRESS:	
		STREET 1:		2201 SOUTH MCDOWELL BLVD
		CITY:			PETALUMA
		STATE:			CA
		ZIP:			94954
		BUSINESS PHONE:		7077635600

	MAIL ADDRESS:	
		STREET 1:		2201 SOUTH MCDOWELL BLVD
		CITY:			PETALUMA
		STATE:			CA
		ZIP:			94954

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			MATTSON BRAD
		CENTRAL INDEX KEY:			0000943666

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-26824
		FILM NUMBER:		05855984

	BUSINESS ADDRESS:	
		STREET 1:		3550 WEST WARREN AVENUE
		CITY:			FREMONT
		STATE:			CA
		ZIP:			94538

	MAIL ADDRESS:	
		STREET 1:		C/O MATTSON TECHNOLOGY
		STREET 2:		3550 WEST WARREN AVENUE
		CITY:			FREMONT
		STATE:			CA
		ZIP:			94538
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>form4mattson052405_ex.xml
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2005-05-20</periodOfReport>

    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0000931059</issuerCik>
        <issuerName>TEGAL CORP /DE/</issuerName>
        <issuerTradingSymbol>TGAL</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0000943666</rptOwnerCik>
            <rptOwnerName>MATTSON BRAD</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>3550 WEST WARREN AVENUE</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>FREMONT</rptOwnerCity>
            <rptOwnerState>CA</rptOwnerState>
            <rptOwnerZipCode>94538</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>1</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle>Executive Chairman</officerTitle>
        </reportingOwnerRelationship>
    </reportingOwner>

    <derivativeTable>
        <derivativeTransaction>
            <securityTitle>
                <value>Non-Qualified Stock Options</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>1.1</value>
            </conversionOrExercisePrice>
            <transactionDate>
                <value>2005-05-20</value>
            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>1000000</value>
                    <footnoteId id="F1"/>
                </transactionShares>
                <transactionPricePerShare>
                    <value>1.1</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <exerciseDate>
                <value>2005-06-20</value>
                <footnoteId id="F1"/>
            </exerciseDate>
            <expirationDate>
                <value>2015-05-20</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>1000000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>1400000</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeTransaction>
    </derivativeTable>

    <footnotes>
        <footnote id="F1">On 5/20/05, Mr. Mattson was granted an option to purchase 1,000,000 shares of common stock. The option vests in increments of
83,333 shares on each monthly anniversary of grant.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>/s/ Thomas R. Mika by Power of Atty</signatureName>
        <signatureDate>2005-05-25</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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