-----BEGIN PRIVACY-ENHANCED MESSAGE-----
Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
Originator-Key-Asymmetric:
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 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 CkYdXcG6qVuhq2dTUfEEwZ2yLKqB2H3ihsHkkYnn8sc6yiTvJxIilgfiJ2CX658F
 /PSnDSI1xbwejOAEXJHIPw==

<SEC-DOCUMENT>0000931059-05-000018.txt : 20050317
<SEC-HEADER>0000931059-05-000018.hdr.sgml : 20050317
<ACCEPTANCE-DATETIME>20050317110633
ACCESSION NUMBER:		0000931059-05-000018
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20050302
FILED AS OF DATE:		20050317
DATE AS OF CHANGE:		20050317

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			TEGAL CORP /DE/
		CENTRAL INDEX KEY:			0000931059
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				680370244
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			0331

	BUSINESS ADDRESS:	
		STREET 1:		2201 SOUTH MCDOWELL BLVD
		CITY:			PETALUMA
		STATE:			CA
		ZIP:			94954
		BUSINESS PHONE:		7077635600

	MAIL ADDRESS:	
		STREET 1:		2201 SOUTH MCDOWELL BLVD
		CITY:			PETALUMA
		STATE:			CA
		ZIP:			94954

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Hergenrother Christine Terese
		CENTRAL INDEX KEY:			0001320919

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-26824
		FILM NUMBER:		05687779

	BUSINESS ADDRESS:	
		BUSINESS PHONE:		(707) 765-5616

	MAIL ADDRESS:	
		STREET 1:		2201 S. MCDOWELL BOULEVARD
		CITY:			PETALUMA
		STATE:			CA
		ZIP:			94954
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>form3cth_ex.xml
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>3</documentType>

    <periodOfReport>2005-03-02</periodOfReport>

    <noSecuritiesOwned>0</noSecuritiesOwned>

    <issuer>
        <issuerCik>0000931059</issuerCik>
        <issuerName>TEGAL CORP /DE/</issuerName>
        <issuerTradingSymbol>TGAL</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001320919</rptOwnerCik>
            <rptOwnerName>Hergenrother Christine Terese</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O 2201 S. MCDOWELL BLVD</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>PETALUMA</rptOwnerCity>
            <rptOwnerState>CA</rptOwnerState>
            <rptOwnerZipCode>94954</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>1</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle>Vice President &amp; CFO</officerTitle>
        </reportingOwnerRelationship>
    </reportingOwner>

    <derivativeTable>
        <derivativeHolding>
            <securityTitle>
                <value>Non-Qualified Stock Options</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>1.32</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2005-06-15</value>
            </exerciseDate>
            <expirationDate>
                <value>2014-06-15</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>50000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
        <derivativeHolding>
            <securityTitle>
                <value>Non-Qualified Stock Options</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>1.03</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2006-03-11</value>
            </exerciseDate>
            <expirationDate>
                <value>2015-03-11</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>150000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
        <derivativeHolding>
            <securityTitle>
                <value>Non-Qualified Stock Options</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>1.03</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2005-03-11</value>
            </exerciseDate>
            <expirationDate>
                <value>2015-03-11</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>15000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
    </derivativeTable>

    <ownerSignature>
        <signatureName>/s/ Christine Hergenrother</signatureName>
        <signatureDate>2005-03-16</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
-----END PRIVACY-ENHANCED MESSAGE-----