-----BEGIN PRIVACY-ENHANCED MESSAGE-----
Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 QV4OBwTwd+wK2Q26CEkVOB450nfaAmP1/qjpil1GdIbtRzVE3AljAXlDBsL3qiV1
 uxxNSA/lFrxxbWhXSS/QPg==

<SEC-DOCUMENT>0000919574-05-003365.txt : 20050926
<SEC-HEADER>0000919574-05-003365.hdr.sgml : 20050926
<ACCEPTANCE-DATETIME>20050926124648
ACCESSION NUMBER:		0000919574-05-003365
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20050915
FILED AS OF DATE:		20050926
DATE AS OF CHANGE:		20050926

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			TEGAL CORP /DE/
		CENTRAL INDEX KEY:			0000931059
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				680370244
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			0331

	BUSINESS ADDRESS:	
		STREET 1:		2201 SOUTH MCDOWELL BLVD
		CITY:			PETALUMA
		STATE:			CA
		ZIP:			94954
		BUSINESS PHONE:		7077635600

	MAIL ADDRESS:	
		STREET 1:		2201 SOUTH MCDOWELL BLVD
		CITY:			PETALUMA
		STATE:			CA
		ZIP:			94954

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			BONANZA MASTER FUND LTD
		CENTRAL INDEX KEY:			0001316503
		STATE OF INCORPORATION:			E9
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-26824
		FILM NUMBER:		051102392

	BUSINESS ADDRESS:	
		STREET 1:		C/O J.D. CLARK & CO.
		STREET 2:		ONE PRAESIDEO PLACE, 1590 W. PARK CIRCLE
		CITY:			OGDEN
		STATE:			UT
		ZIP:			84404
		BUSINESS PHONE:		214-987-4962

	MAIL ADDRESS:	
		STREET 1:		C/O J.D. CLARK & CO.
		STREET 2:		ONE PRAESIDEO PLACE, 1590 W. PARK CIRCLE
		CITY:			OGDEN
		STATE:			UT
		ZIP:			84404

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			BONANZA CAPITAL LTD
		CENTRAL INDEX KEY:			0001249045
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-26824
		FILM NUMBER:		051102393

	BUSINESS ADDRESS:	
		STREET 1:		300 CRESCENT COURT
		STREET 2:		SUITE 1740
		CITY:			DALLAS
		STATE:			TX
		ZIP:			75201
		BUSINESS PHONE:		2149874962

	MAIL ADDRESS:	
		STREET 1:		300 CRESCENT COURT
		STREET 2:		SUITE 1740
		CITY:			DALLAS
		STATE:			TX
		ZIP:			75201
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>p603418_ex.xml
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>3</documentType>

    <periodOfReport>2005-09-15</periodOfReport>

    <noSecuritiesOwned>0</noSecuritiesOwned>

    <issuer>
        <issuerCik>0000931059</issuerCik>
        <issuerName>TEGAL CORP /DE/</issuerName>
        <issuerTradingSymbol>TGAL</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001249045</rptOwnerCik>
            <rptOwnerName>BONANZA CAPITAL LTD</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>300 CRESCENT COURT</rptOwnerStreet1>
            <rptOwnerStreet2>SUITE 1740</rptOwnerStreet2>
            <rptOwnerCity>DALLAS</rptOwnerCity>
            <rptOwnerState>TX</rptOwnerState>
            <rptOwnerZipCode>75201</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>1</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001316503</rptOwnerCik>
            <rptOwnerName>BONANZA MASTER FUND LTD</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O J.D. CLARK &amp; CO.</rptOwnerStreet1>
            <rptOwnerStreet2>ONE PRAESIDEO PLACE, 1590 W. PARK CIRCLE</rptOwnerStreet2>
            <rptOwnerCity>OGDEN</rptOwnerCity>
            <rptOwnerState>UT</rptOwnerState>
            <rptOwnerZipCode>84404</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>1</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
        <nonDerivativeHolding>
            <securityTitle>
                <value>Common Shares</value>
            </securityTitle>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>6153846</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>I</value>
                </directOrIndirectOwnership>
                <natureOfOwnership>
                    <value>Footnote</value>
                    <footnoteId id="F1"/>
                </natureOfOwnership>
            </ownershipNature>
        </nonDerivativeHolding>
    </nonDerivativeTable>

    <derivativeTable>
        <derivativeHolding>
            <securityTitle>
                <value>Warrants</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>1.00</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2005-07-11</value>
            </exerciseDate>
            <expirationDate>
                <value>2010-07-11</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>560000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>I</value>
                </directOrIndirectOwnership>
                <natureOfOwnership>
                    <value>Footnote</value>
                    <footnoteId id="F1"/>
                </natureOfOwnership>
            </ownershipNature>
        </derivativeHolding>
        <derivativeHolding>
            <securityTitle>
                <value>Warrants</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>1.00</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2005-09-15</value>
            </exerciseDate>
            <expirationDate>
                <value>2010-09-15</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>2516923</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>I</value>
                </directOrIndirectOwnership>
                <natureOfOwnership>
                    <value>Footnote</value>
                    <footnoteId id="F1"/>
                </natureOfOwnership>
            </ownershipNature>
        </derivativeHolding>
    </derivativeTable>

    <footnotes>
        <footnote id="F1">The securities reported herein are held in the account of Bonanza Master Fund, Ltd. (the &quot;Master Fund&quot;), a private investment
fund. Bonanza Capital, Ltd. may be deemed to be a beneficial owner of such securities by virtue of its role as the
investment manager of the Master Fund.</footnote>
    </footnotes>

    <remarks>(+) Each of Bonanza Capital, Ltd. and Bonanza Master Fund, Ltd. (each, a &quot;Reporting Person&quot; and together, the &quot;Reporting
Persons&quot;), disclaims beneficial ownership of the reported securities except to the extent of its pecuniary interest therein.
The Reporting Persons affirmatively disclaim being a &quot;group&quot; for purposes of Section 16 of the Securities Exchange Act of
1934, as amended.</remarks>

    <ownerSignature>
        <signatureName>Bonanza Capital, Ltd.(+) By: /s/ Bernay Box</signatureName>
        <signatureDate>2005-09-26</signatureDate>
    </ownerSignature>

    <ownerSignature>
        <signatureName>Bonanza Master Fund, Ltd.(+) By: /s/ Bernay Box</signatureName>
        <signatureDate>2005-09-26</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
-----END PRIVACY-ENHANCED MESSAGE-----