Document and Entity Information - shares	3 Months Ended
	Mar. 27, 2016	Apr. 29, 2016
Document and Entity Information
Entity Registrant Name	MATTSON TECHNOLOGY INC
Entity Central Index Key	0000928421
Current Fiscal Year End Date	--12-31
Entity Filer Category	Accelerated Filer
Document Type	10-Q
Document Period End Date	Mar. 27, 2016
Document Fiscal Year Focus	2016
Document Fiscal Period Focus	Q1
Amendment Flag	false
Entity Common Stock, Shares Outstanding		75,656,763