Segment Information Narrative (Details) (Customer Concentration Risk [Member], USD $) In Millions, unless otherwise specified	3 Months Ended		6 Months Ended
	Jun. 30, 2014	Jun. 30, 2013	Jun. 30, 2014	Jun. 30, 2013
Sales Revenue, Goods, Net [Member] | Applied Materials, Inc. [Member]
Revenue, Major Customer [Line Items]
Sales Revenue, Goods, Net	$ 21.2	$ 22.9	$ 48.2	$ 41.6
Concentration Risk, Percentage	14.50%	16.40%		16.80%
Sales Revenue, Goods, Net [Member] | AMEC [Member]
Revenue, Major Customer [Line Items]
Sales Revenue, Goods, Net			31.9
Sales Revenue, Goods, Net [Member] | Lam Research and Novellus Systems, Inc. [Member]
Revenue, Major Customer [Line Items]
Sales Revenue, Goods, Net	$ 15.0		$ 32.8
Concentration Risk, Percentage	10.30%
Minimum [Member] | Accounts Receivable [Member]
Revenue, Major Customer [Line Items]
Concentration Risk, Percentage	10.00%