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Filing Detail
Form SC 13G - Statement of Beneficial Ownership by Certain Investors:
SEC Accession No. 0000924355-02-000197
Filing Date
2002-11-06
Accepted
2002-11-06 15:25:43
Documents
1

Document Format Files

Seq Description Document Type Size
1 THERMA WAVE INC. 10/02 13G twav13g1002.htm SC 13G 17637
  Complete submission text file 0000924355-02-000197.txt   19602
Mailing Address 1250 RELIANCE WAY FREMONT CA 94539
Business Address 1250 RELIANCE WAY FREMONT CA 94539 5104903663
THERMA WAVE INC (Subject) CIK: 0000828119 (see all company filings)

IRS No.: 943000561 | State of Incorp.: DE | Fiscal Year End: 0331
Type: SC 13G | Act: 34 | File No.: 005-60517 | Film No.: 02811129
SIC: 3823 Industrial Instruments For Measurement, Display, and Control

Mailing Address ONE FINANCIAL CENTER BOSTON MA 02111
Business Address ONE FINANCIAL CENTER BOSTON MA 02111 6173571399
STATE STREET RESEARCH & MANAGEMENT CO //MA/ (Filed by) CIK: 0000924355 (see all company filings)

IRS No.: 133142135 | State of Incorp.: DE | Fiscal Year End: 1231