Marketable Securities (Details 3) - USD ($) $ in Thousands	Dec. 31, 2022	Dec. 31, 2021
Debt securities, available-for-sale
Less than 12 Months, fair value	$ 74,431	$ 338,605
Less than 12 months, gross unrealized loss	(58)	(1,071)
12 months or greater, fair value	112,147	0
12 months or greater, gross unrealized losses	(3,566)	0
Fair value	186,578	338,605
Gross unrealized losses	(3,624)	(1,071)
U.S. Government bonds and notes
Debt securities, available-for-sale
Less than 12 Months, fair value	28,893	82,822
Less than 12 months, gross unrealized loss	(23)	(301)
12 months or greater, fair value	62,588	0
12 months or greater, gross unrealized losses	(1,857)	0
Corporate notes, bonds and commercial paper
Debt securities, available-for-sale
Less than 12 Months, fair value	45,538	255,783
Less than 12 months, gross unrealized loss	(35)	(770)
12 months or greater, fair value	49,559	0
12 months or greater, gross unrealized losses	$ (1,709)	$ 0