SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549


                                    FORM 8-K

                                 CURRENT REPORT



     Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934


         Date of Report (Date of earliest event reported): May 17, 1997



                       Advanced Technology Materials, Inc.
                      -----------------------------------
             (Exact name of registrant as specified in its charter)





   Delaware                   0-22756                            06-1236302
   --------                   -------                            ----------
(State or other        (Commission File Number)              (I.R.S. Employer
jurisdiction of                                             Identification No.)
incorporation or
organization)


     7 Commerce Drive, Danbury, CT                                   06810
     -----------------------------                                   -----
(Address of principal executive offices)                           (Zip Code)



                                  203-794-1100
                                  ------------
              (Registrant's telephone number, including area code)




                       ADVANCED TECHNOLOGY MATERIALS, INC.

                               Report on Form 8-K



TABLE OF CONTENTS
                                                                            Page

INFORMATION TO BE INCLUDED IN THE REPORT


Item 5. Other events..................................................       3


Signatures............................................................       4





Item 5. Other events.


     On May 17,  1997,  the  registrant,  Advanced  Technology  Materials,  Inc.
("ATMI"),  executed an Agreement and Plan of Merger (the "Agreement") to acquire
all of the issued and outstanding stock in Lawrence Semiconductor  Laboratories,
Inc.  ("LSL").  LSL is an outsourcer of epitaxial  processing of silicon  wafers
using  chemical  vapor  deposition  technology to meet customer  specifications.
Epitaxial  processing is one of many steps  involved in  transforming  a silicon
wafer into a  semiconductor  chip,  the  primary  functional  component  of most
electronic products. The Agreement is subject to approval by ATMI's stockholders
and the satisfaction of other customary conditions.

     Pursuant  to the  Agreement,  stockholders  in  LSL  will  receive  between
approximately 3,714,285 and 4,588,235 shares of common stock of ATMI (or a newly
created  holding  company if the  pending  acquisition  of  Advanced  Delivery &
Chemical  Systems Nevada,  Inc. and related entities is consummated) in exchange
for their  shares.  The  actual  number  of shares to be issued to the  Lawrence
stockholders  depends  upon the average  closing  price of ATMI's  common  stock
during a 20 day trading period ending three days prior to  stockholder  approval
of the Agreement and changes in the net book value of Lawrence up to the time of
closing.  The acquisition is intended to be accounted as a  pooling-of-interests
transaction.  ATMI  intends to continue  the  business  currently  performed  by
Lawrence  by  combining  it with its  Epitronics  division  which  provides  epi
services for gallium arsenide and other advanced materials.




SIGNATURES

     Pursuant to the  requirements  of the Securities  Exchange Act of 1934, the
registrant  has duly  caused  this  report  to be  signed  on its  behalf by the
undersigned thereunto duly authorized.

Advanced Technology Materials, Inc.

May 30, 1997



By /S/ Daniel P. Sharkey