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Related Party Transactions (Details) (KLA-Tencor Corporation ("KLA-Tencor"), USD $)
In Millions, unless otherwise specified
0 Months Ended 1 Months Ended 3 Months Ended 6 Months Ended
Dec. 29, 2012
item
Aug. 15, 2012
item
Dec. 31, 2011
Dec. 31, 2011
Jun. 30, 2012
KLA-Tencor Corporation ("KLA-Tencor")
         
Transactions with Related Party          
Sales:     $ 1.8 $ 3.9  
Accounts Receivable:         $ 0.9
Board of Directors in Common          
Number of the Company's board members that are also on the Board of related party entity 0 1