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Related Party Transactions (Details) (KLA-Tencor Corporation ("KLA-Tencor"), USD $) In Millions, unless otherwise specified	3 Months Ended		9 Months Ended
	Mar. 31, 2012 member	Apr. 02, 2011	Mar. 31, 2012 member	Apr. 02, 2011	Jul. 02, 2011
KLA-Tencor Corporation ("KLA-Tencor")
Transactions with Related Party
Sales:	$ 2.1	$ 1.7	$ 6.0	$ 4.4
Accounts Receivable:	$ 1.2		$ 1.2		$ 0.7
Board of Directors in Common
Number of the Company's board members that are also on the Board of related party entity	1		1

The aggregate amount of receivables to be collected from related parties where one party can exercise control or significant influence over another party; including affiliates, owners or officers and their immediate families, pension trusts, and so forth, at the financial statement date. which are usually due within one year (or one business cycle).

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