<SEC-DOCUMENT>0001510192-16-000132-index.html : 20160728
<SEC-HEADER>0001510192-16-000132.hdr.sgml : 20160728
<ACCEPTANCE-DATETIME>20160728135344
ACCESSION NUMBER:		0001510192-16-000132
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		2
CONFORMED PERIOD OF REPORT:	20160719
FILED AS OF DATE:		20160728
DATE AS OF CHANGE:		20160728

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ULTRATECH INC
		CENTRAL INDEX KEY:			0000909791
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				943169580
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134
		BUSINESS PHONE:		4083218835

	MAIL ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	ULTRATECH STEPPER INC
		DATE OF NAME CHANGE:	19930727

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Gopi Paramesh
		CENTRAL INDEX KEY:			0001441886

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-22248
		FILM NUMBER:		161789487

	BUSINESS ADDRESS:	
		BUSINESS PHONE:		408 255-2585

	MAIL ADDRESS:	
		STREET 1:		11514 SUNSET SPRING COURT
		CITY:			CUPERTINO
		STATE:			CA
		ZIP:			95014
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>primary_doc.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
Document 1 - file: primary_doc.html

Document 1 - RAW XML: primary_doc.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24
<SEQUENCE>2
<FILENAME>gopipoa.txt
<TEXT>
Document 2 - file: gopipoa.txt

</DOCUMENT>
</SEC-DOCUMENT>