<SEC-DOCUMENT>0001193125-16-620485-index.html : 20160614
<SEC-HEADER>0001193125-16-620485.hdr.sgml : 20160614
<ACCEPTANCE-DATETIME>20160613213634
ACCESSION NUMBER:		0001193125-16-620485
CONFORMED SUBMISSION TYPE:	DFAN14A
PUBLIC DOCUMENT COUNT:		10
FILED AS OF DATE:		20160614
DATE AS OF CHANGE:		20160613
EFFECTIVENESS DATE:		20160614

SUBJECT COMPANY:	

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ULTRATECH INC
		CENTRAL INDEX KEY:			0000909791
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				943169580
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		DFAN14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-22248
		FILM NUMBER:		161711917

	BUSINESS ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134
		BUSINESS PHONE:		4083218835

	MAIL ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	ULTRATECH STEPPER INC
		DATE OF NAME CHANGE:	19930727

FILED BY:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			Neuberger Berman Group LLC
		CENTRAL INDEX KEY:			0001465109
		IRS NUMBER:				611591182
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		DFAN14A

	BUSINESS ADDRESS:	
		STREET 1:		605 THIRD AVENUE
		CITY:			NEW YORK
		STATE:			NY
		ZIP:			10158
		BUSINESS PHONE:		212-476-9000

	MAIL ADDRESS:	
		STREET 1:		605 THIRD AVENUE
		CITY:			NEW YORK
		STATE:			NY
		ZIP:			10158
</SEC-HEADER>
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<SEQUENCE>1
<FILENAME>d195328ddfan14a.htm
<DESCRIPTION>DFAN14A
<TEXT>
Document 1 - file: d195328ddfan14a.htm

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<FILENAME>g1953281.jpg
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<TEXT>
Document 2 - file: g1953281.jpg

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<SEQUENCE>3
<FILENAME>g19532811.jpg
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<TEXT>
Document 3 - file: g19532811.jpg

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<SEQUENCE>4
<FILENAME>g19532812.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 4 - file: g19532812.jpg

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<TYPE>GRAPHIC
<SEQUENCE>5
<FILENAME>g1953281500.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 5 - file: g1953281500.jpg

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<TYPE>GRAPHIC
<SEQUENCE>6
<FILENAME>g1953282.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 6 - file: g1953282.jpg

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<SEQUENCE>7
<FILENAME>g1953284.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 7 - file: g1953284.jpg

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<TYPE>GRAPHIC
<SEQUENCE>8
<FILENAME>g1953289.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 8 - file: g1953289.jpg

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<TYPE>GRAPHIC
<SEQUENCE>9
<FILENAME>g195328im1.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 9 - file: g195328im1.jpg

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<TYPE>GRAPHIC
<SEQUENCE>10
<FILENAME>g195328img01.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 10 - file: g195328img01.jpg

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