<SEC-DOCUMENT>0001193125-15-146698-index.html : 20150424
<SEC-HEADER>0001193125-15-146698.hdr.sgml : 20150424
<ACCEPTANCE-DATETIME>20150424160807
ACCESSION NUMBER:		0001193125-15-146698
CONFORMED SUBMISSION TYPE:	10-K/A
PUBLIC DOCUMENT COUNT:		3
CONFORMED PERIOD OF REPORT:	20141231
FILED AS OF DATE:		20150424
DATE AS OF CHANGE:		20150424

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ULTRATECH INC
		CENTRAL INDEX KEY:			0000909791
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				943169580
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		10-K/A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-22248
		FILM NUMBER:		15791922

	BUSINESS ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134
		BUSINESS PHONE:		4083218835

	MAIL ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	ULTRATECH STEPPER INC
		DATE OF NAME CHANGE:	19930727
</SEC-HEADER>
<DOCUMENT>
<TYPE>10-K/A
<SEQUENCE>1
<FILENAME>d914127d10ka.htm
<DESCRIPTION>FORM 10-K/A
<TEXT>
Document 1 - file: d914127d10ka.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-31.1
<SEQUENCE>2
<FILENAME>d914127dex311.htm
<DESCRIPTION>EX-31.1
<TEXT>
Document 2 - file: d914127dex311.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-31.2
<SEQUENCE>3
<FILENAME>d914127dex312.htm
<DESCRIPTION>EX-31.2
<TEXT>
Document 3 - file: d914127dex312.htm

</DOCUMENT>
</SEC-DOCUMENT>