<SEC-DOCUMENT>0001193125-14-386768-index.html : 20141029
<SEC-HEADER>0001193125-14-386768.hdr.sgml : 20141029
<ACCEPTANCE-DATETIME>20141029132306
ACCESSION NUMBER:		0001193125-14-386768
CONFORMED SUBMISSION TYPE:	8-K
PUBLIC DOCUMENT COUNT:		3
CONFORMED PERIOD OF REPORT:	20141027
ITEM INFORMATION:		Other Events
ITEM INFORMATION:		Financial Statements and Exhibits
FILED AS OF DATE:		20141029
DATE AS OF CHANGE:		20141029

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ULTRATECH INC
		CENTRAL INDEX KEY:			0000909791
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				943169580
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		8-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-22248
		FILM NUMBER:		141179400

	BUSINESS ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134
		BUSINESS PHONE:		4083218835

	MAIL ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	ULTRATECH STEPPER INC
		DATE OF NAME CHANGE:	19930727
</SEC-HEADER>
<DOCUMENT>
<TYPE>8-K
<SEQUENCE>1
<FILENAME>d811053d8k.htm
<DESCRIPTION>8-K
<TEXT>
Document 1 - file: d811053d8k.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-99.1
<SEQUENCE>2
<FILENAME>d811053dex991.htm
<DESCRIPTION>EX-99.1
<TEXT>
Document 2 - file: d811053dex991.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>g811053g41a40.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 3 - file: g811053g41a40.jpg

</DOCUMENT>
</SEC-DOCUMENT>