-----BEGIN PRIVACY-ENHANCED MESSAGE-----
Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
Originator-Key-Asymmetric:
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 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 QPIEPtGRirNdmvCtPooRJJSP4Wf/X/04MCD2SQAHPHaX5aMx8Fc3Eo24nLUz3U1V
 95WJjAAomHXbe7Aeo4e3MA==

<SEC-DOCUMENT>0001157523-07-001187.txt : 20070207
<SEC-HEADER>0001157523-07-001187.hdr.sgml : 20070207
<ACCEPTANCE-DATETIME>20070207140148
ACCESSION NUMBER:		0001157523-07-001187
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20070205
FILED AS OF DATE:		20070207
DATE AS OF CHANGE:		20070207

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ULTRATECH INC
		CENTRAL INDEX KEY:			0000909791
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				943169580
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134
		BUSINESS PHONE:		4083218835

	MAIL ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	ULTRATECH STEPPER INC
		DATE OF NAME CHANGE:	19930727

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			RICHARD HENRI P
		CENTRAL INDEX KEY:			0001192011

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-22248
		FILM NUMBER:		07587355

	BUSINESS ADDRESS:	
		BUSINESS PHONE:		4087494000

	MAIL ADDRESS:	
		STREET 1:		ADVANCED MICRO DEVICES INC
		STREET 2:		ONE AMD PLACE MS 68 PO BOX 3453
		CITY:			SUNNYVALE
		STATE:			CA
		ZIP:			94088-3453

	FORMER NAME:	
		FORMER CONFORMED NAME:	RICHARD HENRI F
		DATE OF NAME CHANGE:	20020924
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>a5329080_ex.xml
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2007-02-05</periodOfReport>

    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0000909791</issuerCik>
        <issuerName>ULTRATECH INC</issuerName>
        <issuerTradingSymbol>UTEK</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001192011</rptOwnerCik>
            <rptOwnerName>RICHARD HENRI P</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>ADVANCED MICRO DEVICES, INC</rptOwnerStreet1>
            <rptOwnerStreet2>ONE AMD PLACE, MS 68 PO BOX 3453</rptOwnerStreet2>
            <rptOwnerCity>SUNNYVALE</rptOwnerCity>
            <rptOwnerState>CA</rptOwnerState>
            <rptOwnerZipCode>94088-3453</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <derivativeTable>
        <derivativeTransaction>
            <securityTitle>
                <value>Employee Stock Option (Right to Buy)</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>11.96</value>
            </conversionOrExercisePrice>
            <transactionDate>
                <value>2007-02-05</value>
            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>8000</value>
                </transactionShares>
                <transactionPricePerShare>
                    <footnoteId id="F2"/>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <exerciseDate>
                <value>2007-02-05</value>
                <footnoteId id="F1"/>
            </exerciseDate>
            <expirationDate>
                <value>2017-02-04</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>8000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>20000</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeTransaction>
    </derivativeTable>

    <footnotes>
        <footnote id="F1">Option is immediately exercisable, but underlying shares are subject to repurchase by the Company at cost should optionee
 cease to provide service to the Company prior to vesting in such shares. The Company's right of repurchase shall lapse with
 respect to 100% of the shares upon the earlier of (i) completion of one year of Board service measured from the 2006
 Stockholders' meeting held on July 18, 2006 and (ii) the optionee's continuation in Board service through the day
 immediately preceding the date of the first annual meeting of stockholders following the date of grant.</footnote>
        <footnote id="F2">The Option was granted in an exempt transaction pursuant to SEC Rule 16b-3(d).</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>/s/ Bruce R. Wright, Attorney-in-Fact for Henri Richard</signatureName>
        <signatureDate>2007-02-06</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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