Exhibit 99.1

         Ultratech Announces Resignation of President and COO


    SAN JOSE, Calif.--(BUSINESS WIRE)--Oct. 5, 2006--Ultratech, Inc.
(Nasdaq: UTEK), a leading supplier of lithography and laser-processing
systems used to manufacture semiconductors and nanotechnology devices,
today announced that its President and Chief Operating Officer, John
E. Denzel, has resigned effective immediately to pursue other
opportunities.

    Arthur W. Zafiropoulo, Chairman of the Board and Chief Executive
Officer, has assumed the responsibilities previously performed by Mr.
Denzel. Mr. Denzel will continue with the company for a certain period
of time reporting to Mr. Zafiropoulo.

    "During the time John and I have worked together, I have come to
respect him a great deal, both as a person and as a professional. His
leadership and strong character have guided the organization through
challenging times," Zafiropoulo said. "I am confident that John has a
bright future ahead of him and, on behalf of our entire management
team, I sincerely wish him well as he pursues the next chapter of his
career."

    About Ultratech: Ultratech, Inc. (Nasdaq: UTEK) designs,
manufactures and markets photolithography equipment used worldwide in
the fabrication of semiconductor and nanotechnology devices, and has
expanded its technology scope in pioneering laser processing
technology for IC manufacturing. Founded in 1979, Ultratech is a
market leader in gold and solder bump lithography. Its products are
designed to substantially reduce the cost of ownership for
manufacturers in the electronics industry. The company's home page on
the World Wide Web is located at www.ultratech.com.


    CONTACT: Ultratech, Inc.
             Bruce R. Wright, 408-321-8835
             Senior Vice President & CFO
             or
             Laura Rebouche, 408-321-8835
             Vice President, Investor Relations and
             Corporate Communications
             Fax: 408-577-3379
             Email: lrebouche@ultratech.com