<SEC-DOCUMENT>0001140361-17-006106-index.html : 20170213
<SEC-HEADER>0001140361-17-006106.hdr.sgml : 20170213
<ACCEPTANCE-DATETIME>20170213133434
ACCESSION NUMBER:		0001140361-17-006106
CONFORMED SUBMISSION TYPE:	SC 13D/A
PUBLIC DOCUMENT COUNT:		2
FILED AS OF DATE:		20170213
DATE AS OF CHANGE:		20170213
GROUP MEMBERS:		AMIT SOLOMON
GROUP MEMBERS:		BENJAMIN NAHUM
GROUP MEMBERS:		JAMES MCAREE
GROUP MEMBERS:		NEUBEGER BERMAN FIXED INCOME HOLDINGS LLC
GROUP MEMBERS:		NEUBERGER BERMAN BD LLC
GROUP MEMBERS:		NEUBERGER BERMAN INVESTMENT ADVISERS LLC

SUBJECT COMPANY:	

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ULTRATECH INC
		CENTRAL INDEX KEY:			0000909791
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				943169580
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SC 13D/A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	005-44773
		FILM NUMBER:		17597816

	BUSINESS ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134
		BUSINESS PHONE:		4083218835

	MAIL ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	ULTRATECH STEPPER INC
		DATE OF NAME CHANGE:	19930727

FILED BY:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			Neuberger Berman Group LLC
		CENTRAL INDEX KEY:			0001465109
		IRS NUMBER:				611591182
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SC 13D/A

	BUSINESS ADDRESS:	
		STREET 1:		1290 AVENUE OF THE AMERICAS
		CITY:			NEW YORK
		STATE:			NY
		ZIP:			10104
		BUSINESS PHONE:		212-476-9000

	MAIL ADDRESS:	
		STREET 1:		1290 AVENUE OF THE AMERICAS
		CITY:			NEW YORK
		STATE:			NY
		ZIP:			10104
</SEC-HEADER>
<DOCUMENT>
<TYPE>SC 13D/A
<SEQUENCE>1
<FILENAME>doc1.htm
<DESCRIPTION>NONE
<TEXT>
Document 1 - file: doc1.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-99.28
<SEQUENCE>2
<FILENAME>ex99_28.htm
<DESCRIPTION>EX-99.28
<TEXT>
Document 2 - file: ex99_28.htm

</DOCUMENT>
</SEC-DOCUMENT>